Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048812 | Pitch reduced patterns relative to photolithography features | Luan C. Tran, William T. Rericha, John Lee, Ramakanth Alapati, Sheron Honarkhah +7 more | 2011-11-01 |
| 7985692 | Method to reduce charge buildup during high aspect ratio contact etch | Gurtej S. Sandhu, Max Hineman, Daniel A. Steckert, Shane J. Trapp, Tony Schrock | 2011-07-26 |
| 7884022 | Multiple deposition for integration of spacers in pitch multiplication process | Gurtej S. Sandhu, Shuang Meng | 2011-02-08 |