Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048812 | Pitch reduced patterns relative to photolithography features | Luan C. Tran, William T. Rericha, John Lee, Ramakanth Alapati, Sheron Honarkhah +7 more | 2011-11-01 |
| 7884022 | Multiple deposition for integration of spacers in pitch multiplication process | Jingyi Bai, Gurtej S. Sandhu | 2011-02-08 |
| 7872291 | Enhanced atomic layer deposition | Garo Derderian, Gurtej S. Sandhu | 2011-01-18 |