Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076174 | Method of forming a sputtering target | Deborah Mathias, Neil Mackie | 2011-12-13 |
| 8048707 | Sulfur salt containing CIG targets, methods of making and methods of use thereof | Paul Shufflebotham, Robert Tas, Neil Mackie | 2011-11-01 |
| 8017523 | Deposition of doped copper seed layers having improved reliability | Hui-Jung Wu, Wen Wu, Girish Dixit | 2011-09-13 |
| 8017976 | Barrier for doped molybdenum targets | Deborah Mathias, Neil Mackie | 2011-09-13 |
| 7964504 | PVD-based metallization methods for fabrication of interconnections in semiconductor devices | Roey Shaviv, Alexander Dulkin, Ronald L. Kinder | 2011-06-21 |
| 7935558 | Sodium salt containing CIG targets, methods of making and methods of use thereof | Robert Tas, Neil Mackie, Abdelouahab Ziani | 2011-05-03 |
| 7927912 | Method of forming a sputtering target | Deborah Mathias, Neil Mackie | 2011-04-19 |
| 7897020 | Method for alkali doping of thin film photovoltaic materials | Neil Mackie, Robert B. Zubeck | 2011-03-01 |
| 7892405 | Methods and apparatus for magnetron sputtering | Douglas B. Hayden | 2011-02-22 |