Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066815 | Multi-workpiece processing chamber | Rene George, Ce Qin, Dixit V. Desai | 2011-11-29 |
| 7977258 | Method and system for thermally processing a plurality of wafer-shaped objects | Zsolt Nenyei, Paul Janis Timans, Wilfried Lerch, Juergen Niess, Manfred Falter +6 more | 2011-07-12 |
| 7972444 | Workpiece support with fluid zones for temperature control | Martin L. Zucker, Vladimir Nagorny, Jonathan D. Mohn | 2011-07-05 |