Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066815 | Multi-workpiece processing chamber | Daniel J. Devine, Ce Qin, Dixit V. Desai | 2011-11-29 |
| 7947605 | Post ion implant photoresist strip using a pattern fill and method | Stephen E. Savas | 2011-05-24 |