Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8000587 | Pulsed processing semiconductor heating methods and associated system using combinations of heating sources | Narasimha Acharya | 2011-08-16 |
| 7976216 | Determining the temperature of silicon at high temperatures | — | 2011-07-12 |
| 7977258 | Method and system for thermally processing a plurality of wafer-shaped objects | Zsolt Nenyei, Wilfried Lerch, Juergen Niess, Manfred Falter, Patrick Schmid +6 more | 2011-07-12 |
| 7957926 | System and process for calibrating pyrometers in thermal processing chambers | — | 2011-06-07 |
| 7949237 | Heating configuration for use in thermal processing chambers | Zion Koren, Conor Patrick O'Carroll, Shuen Chun Choy, Rudy Santo Tomas Cardema, James Tsuneo Taoka +1 more | 2011-05-24 |