Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8085390 | Multivariate monitoring method for plasma process machine | Tuung Luoh, Shing-Ann Luo, Chin-Ta Su, Kuang-Chao Chen | 2011-12-27 |
| 8072577 | Lithography systems and processes | Tzong-Hsien Wu, Chih-Yuan Lu | 2011-12-06 |
| 8067292 | Isolation structure, non-volatile memory having the same, and method of fabricating the same | Ming-Da Cheng, Chin-Tsan Yeh, Tuung Luoh, Chin-Ta Su, Kuang-Chao Chen | 2011-11-29 |
| 8034691 | HDP-CVD process, filling-in process utilizing HDP-CVD, and HDP-CVD system | Tuung Luoh, Chin-Ta Su, Kuang-Chao Chen, Shing-Ann Luo | 2011-10-11 |
| 7960835 | Fabrication of metal film stacks having improved bottom critical dimension | Han-Hui Hsu, Shih-Ping Hong, Ming-Tsung Wu, An-Chi Wei, Ching-Hsiung Li +1 more | 2011-06-14 |
| 7939451 | Method for fabricating a pattern | Shih-Chang Tsai, Chun-Hung Lee, Ming-Cheng Deng | 2011-05-10 |