Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8085390 | Multivariate monitoring method for plasma process machine | Tuung Luoh, Shing-Ann Luo, Ta-Hung Yang, Kuang-Chao Chen | 2011-12-27 |
| 8067292 | Isolation structure, non-volatile memory having the same, and method of fabricating the same | Ming-Da Cheng, Chin-Tsan Yeh, Tuung Luoh, Ta-Hung Yang, Kuang-Chao Chen | 2011-11-29 |
| 8047899 | Pad and method for chemical mechanical polishing | Chun-Fu Chen, Yung-Tai Hung, Kuang-Chao Chen | 2011-11-01 |
| 8034691 | HDP-CVD process, filling-in process utilizing HDP-CVD, and HDP-CVD system | Tuung Luoh, Ta-Hung Yang, Kuang-Chao Chen, Shing-Ann Luo | 2011-10-11 |