Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8085390 | Multivariate monitoring method for plasma process machine | Tuung Luoh, Shing-Ann Luo, Chin-Ta Su, Ta-Hung Yang | 2011-12-27 |
| 8067292 | Isolation structure, non-volatile memory having the same, and method of fabricating the same | Ming-Da Cheng, Chin-Tsan Yeh, Tuung Luoh, Chin-Ta Su, Ta-Hung Yang | 2011-11-29 |
| 8047899 | Pad and method for chemical mechanical polishing | Chun-Fu Chen, Yung-Tai Hung, Chin-Ta Su | 2011-11-01 |
| 8034691 | HDP-CVD process, filling-in process utilizing HDP-CVD, and HDP-CVD system | Tuung Luoh, Chin-Ta Su, Ta-Hung Yang, Shing-Ann Luo | 2011-10-11 |
| 8003519 | Systems and methods for back end of line processing of semiconductor circuits | Tuung Luoh, Chi-Tung Huang, Candy Jiang | 2011-08-23 |
| 7951707 | Etching method for semiconductor element | Tuung Luoh, Ling Yang | 2011-05-31 |
| 7938972 | Fabrication method of electronic device | Tuung Luoh, Ling Yang | 2011-05-10 |
| 7888804 | Method for forming self-aligned contacts and local interconnects simultaneously | Tuung Luoh, Ling Yang | 2011-02-15 |