Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981263 | Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same | Hwan Kyu Yoo, Byung Han Yun | 2011-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981263 | Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same | Hwan Kyu Yoo, Byung Han Yun | 2011-07-19 |