Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052850 | Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same | Tae Hyun Lim, Hwan Kyu Yoo | 2011-11-08 |
| 8007644 | Inclined carrier transferring apparatus | Sung Eun Kim, Tae Hyun Lim, Kwang Jong Yoo, Yang Sik Moon | 2011-08-30 |
| 7981263 | Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same | Hyuk Sang Yoon, Hwan Kyu Yoo | 2011-07-19 |