Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052850 | Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same | Tae Hyun Lim, Byung Han Yun | 2011-11-08 |
| 7981263 | Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same | Hyuk Sang Yoon, Byung Han Yun | 2011-07-19 |
| 7927045 | Support platform of non-contact transfer apparatus | Sung Eun Kim, Hyun Joo Jeon, Ji-Young OH, Tae Kyun Kwon | 2011-04-19 |