Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981699 | Method for tunably repairing low-k dielectric damage | James DeYoung, Odette Turmel | 2011-07-19 |
| 7892445 | Wafer electrical discharge control using argon free dechucking gas | David Wei, Howard Dang, Masahiro Watanabe, Sean S. Kang, Kenji Takeshita +2 more | 2011-02-22 |