Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998875 | Vapor phase repair and pore sealing of low-K dielectric materials | — | 2011-08-16 |
| 7981699 | Method for tunably repairing low-k dielectric damage | Stephen M. Sirard, Odette Turmel | 2011-07-19 |