Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084705 | Quartz guard ring centering features | Dean J. Larson, Daniel Arthur Brown, Victor Wang | 2011-12-27 |
| 8051556 | Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, James E. Tappan | 2011-11-08 |
| 8038796 | Apparatus for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, James E. Tappan | 2011-10-18 |
| 7998296 | Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system | Tony Ricci, Jim Tappan | 2011-08-16 |
| 7973539 | Methods for measuring dielectric properties of parts | Jaehyun Kim, Arthur H. Sato, Qing Liu, Feiyang Wu | 2011-07-05 |
| 7939784 | Electrostatic chuck support assembly | Robert Steger | 2011-05-10 |
| 7911213 | Methods for measuring dielectric properties of parts | Jaehyun Kim, Arthur H. Sato, Qing Liu, Feiyang Wu | 2011-03-22 |
| 7875824 | Quartz guard ring centering features | Dean J. Larson, Daniel Arthur Brown, Victor Wang | 2011-01-25 |