Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7993460 | Substrate support having dynamic temperature control | — | 2011-08-09 |
| 7939784 | Electrostatic chuck support assembly | Keith Comendant | 2011-05-10 |
| 7869184 | Method of determining a target mesa configuration of an electrostatic chuck | — | 2011-01-11 |