Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084705 | Quartz guard ring centering features | Dean J. Larson, Keith Comendant, Victor Wang | 2011-12-27 |
| 7939778 | Plasma processing chamber with guard ring for upper electrode assembly | Dean J. Larson, Saurabh Ullal | 2011-05-10 |
| 7875824 | Quartz guard ring centering features | Dean J. Larson, Keith Comendant, Victor Wang | 2011-01-25 |