Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7939778 | Plasma processing chamber with guard ring for upper electrode assembly | Dean J. Larson, Daniel Arthur Brown | 2011-05-10 |
| 7862682 | Showerhead electrode assemblies for plasma processing apparatuses | Thomas R. Stevenson, Anthony de le Llera | 2011-01-04 |