Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040488 | Substrate processing apparatus | Shuichi Yasuda, Masashi Kanaoka, Koji Kaneyama, Tadashi Miyagi, Kazuhito Shigemori +4 more | 2011-10-18 |
| 8034190 | Substrate processing apparatus and substrate processing method | Shuichi Yasuda, Masashi Kanaoka, Koji Kaneyama, Tadashi Miyagi, Kasuhito Shigemori +3 more | 2011-10-11 |
| 8020240 | Substrate treatment apparatus | Nobuyasu Hiraoka, Akiyoshi Nakano | 2011-09-20 |
| 7979942 | Substrate treatment apparatus and substrate treatment method | Nobuyasu Hiraoka, Akiyoshi Nakano, Hajime Ugajin | 2011-07-19 |
| 7866891 | Rolling bearing apparatus | Yoshitaka Waseda | 2011-01-11 |