Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8051522 | Substrate treatment apparatus | Koichi Mukaegaki, Yoshikazu Kago, Hiroyuki Ueno | 2011-11-08 |
| 8020240 | Substrate treatment apparatus | Nobuyasu Hiraoka, Tsuyoshi Okumura | 2011-09-20 |
| 7979942 | Substrate treatment apparatus and substrate treatment method | Nobuyasu Hiraoka, Tsuyoshi Okumura, Hajime Ugajin | 2011-07-19 |