Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040488 | Substrate processing apparatus | Shuichi Yasuda, Masashi Kanaoka, Koji Kaneyama, Kazuhito Shigemori, Toru Asano +4 more | 2011-10-18 |
| 8034190 | Substrate processing apparatus and substrate processing method | Shuichi Yasuda, Masashi Kanaoka, Koji Kaneyama, Kasuhito Shigemori, Toru Asano +3 more | 2011-10-11 |