Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7995199 | Method for detection of oversized sub-resolution assist features | Carl Hess | 2011-08-09 |
| 7995832 | Photomask inspection and verification by lithography image reconstruction using imaging pupil filters | Rui-fang Shi | 2011-08-09 |
| 7932004 | Feature identification for metrological analysis | Carl Hess | 2011-04-26 |
| 7873204 | Method for detecting lithographically significant defects on reticles | Mark J. Wihl, Lih-Huah Yiin | 2011-01-18 |