ST

Shouhong Tang

KL Kla-Tencor: 1 patents #29 of 154Top 20%
🗺 California: #14,783 of 41,698 inventorsTop 40%
Overall (2011): #165,374 of 364,097Top 50%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8068234 Method and apparatus for measuring shape or thickness information of a substrate George Kren, Dieter Mueller, Brian Haas, Daniel Kavaldjiev 2011-11-29