Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068234 | Method and apparatus for measuring shape or thickness information of a substrate | Shouhong Tang, Dieter Mueller, Brian Haas, Daniel Kavaldjiev | 2011-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068234 | Method and apparatus for measuring shape or thickness information of a substrate | Shouhong Tang, Dieter Mueller, Brian Haas, Daniel Kavaldjiev | 2011-11-29 |