Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068234 | Method and apparatus for measuring shape or thickness information of a substrate | Shouhong Tang, George Kren, Dieter Mueller, Brian Haas | 2011-11-29 |
| 7912658 | Systems and methods for determining two or more characteristics of a wafer | Stephen Biellak | 2011-03-22 |