Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972960 | Method for manufacturing thin film | Kyoichi Suguro | 2011-07-05 |
| 7947610 | Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof | Seiji Inumiya, Yasumasa Suizu, Yoshio Ozawa, Kiyotaka Miyano, Masayuki Tanaka | 2011-05-24 |
| 7879658 | Semiconductor device and method for manufacturing the same | Yoshio Ozawa, Ichiro Mizushima, Takashi Suzuki, Hirokazu Ishida | 2011-02-01 |