Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947610 | Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof | Yoshitaka Tsunashima, Seiji Inumiya, Yasumasa Suizu, Yoshio Ozawa, Masayuki Tanaka | 2011-05-24 |
| 7902030 | Manufacturing method for semiconductor device and semiconductor device | Takayuki Ito, Yusuke Oshiki, Kouji Matsuo, Kenichi Yoshino, Takaharu Itani +3 more | 2011-03-08 |