Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947610 | Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof | Yoshitaka Tsunashima, Seiji Inumiya, Yoshio Ozawa, Kiyotaka Miyano, Masayuki Tanaka | 2011-05-24 |