Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8038890 | Piezoelectric-driven MEMS device and method for manufacturing the same | Takashi Kawakubo, Kazuhide Abe, Michihiko Nishigaki | 2011-10-18 |
| 8022599 | Actuator | Takashi Kawakubo, Michihiko Nishigaki | 2011-09-20 |