Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8038890 | Piezoelectric-driven MEMS device and method for manufacturing the same | Takashi Kawakubo, Toshihiko Nagano, Kazuhide Abe | 2011-10-18 |
| 8022599 | Actuator | Takashi Kawakubo, Toshihiko Nagano | 2011-09-20 |
| 7906823 | MEMS apparatus and method of manufacturing the same | Kazuhiro Suzuki, Yutaka Onozuka, Hiroshi Yamada, Kazuhiko Itaya, Hideyuki Funaki | 2011-03-15 |