Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8038890 | Piezoelectric-driven MEMS device and method for manufacturing the same | Takashi Kawakubo, Toshihiko Nagano, Michihiko Nishigaki | 2011-10-18 |
| 8039873 | Semiconductor device | Tadahiro Sasaki, Kazuhiko Itaya | 2011-10-18 |
| 7888762 | Infrared detector and fabricating method of infrared detector | — | 2011-02-15 |