Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8069726 | X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging | Steven S. Nasiri, Alexander Castro | 2011-12-06 |
| 8047075 | Vertically integrated 3-axis MEMS accelerometer with electronics | Steven S. Nasiri, Goksen G. Yaralioglu | 2011-11-01 |
| 8020441 | Dual mode sensing for vibratory gyroscope | — | 2011-09-20 |
| 7934423 | Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics | Steven S. Nasiri, Goksen G. Yaralioglu, Babak Taheri | 2011-05-03 |
| 7863698 | Performance-enhancing two-sided MEMS anchor design for vertically integrated micromachined devices | Goksen G. Yaralioglu, Bruno Borovic, Alexander Castro | 2011-01-04 |