Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7863698 | Performance-enhancing two-sided MEMS anchor design for vertically integrated micromachined devices | Joseph Seeger, Goksen G. Yaralioglu, Alexander Castro | 2011-01-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7863698 | Performance-enhancing two-sided MEMS anchor design for vertically integrated micromachined devices | Joseph Seeger, Goksen G. Yaralioglu, Alexander Castro | 2011-01-04 |