DS

Denis Shamiryan

IM Imec: 1 patents #18 of 134Top 15%
KR Katholieke Universiteit Leuven, Ku Leuven R&D: 1 patents #1 of 24Top 5%
Overall (2011): #316,550 of 364,097Top 90%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7964039 Cleaning of plasma chamber walls using noble gas cleaning step Adam Michal Urbanowicz, Mikhail Baklanov, Stefan De Gendt 2011-06-21