Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7964039 | Cleaning of plasma chamber walls using noble gas cleaning step | Mikhail Baklanov, Denis Shamiryan, Stefan De Gendt | 2011-06-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7964039 | Cleaning of plasma chamber walls using noble gas cleaning step | Mikhail Baklanov, Denis Shamiryan, Stefan De Gendt | 2011-06-21 |