Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021948 | Scalable interpoly dielectric stacks with improved immunity to program saturation | Bogdan Govoreanu, Sven Van Elshocht, Tom Schram | 2011-09-20 |
| 7964039 | Cleaning of plasma chamber walls using noble gas cleaning step | Adam Michal Urbanowicz, Mikhail Baklanov, Denis Shamiryan | 2011-06-21 |