Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960208 | Wafer level hermetic bond using metal alloy with raised feature | Gregory A. Carlson, David M. Erlach, Jeffery F. Summers | 2011-06-14 |
| 7872432 | MEMS thermal device with slideably engaged tether and method of manufacture | Jeffery F. Summers | 2011-01-18 |
| 7864006 | MEMS plate switch and method of manufacture | John S. Foster, Paulo Silveira da Motta, Kimon Rybnicek | 2011-01-04 |