Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981755 | Self aligned ring electrodes | Matthew J. Breitwisch, Eric A. Joseph, Chung H. Lam, Alejandro G. Schrott | 2011-07-19 |
| 7972966 | Etching of tungsten selective to titanium nitride | Matthew J. Breitwisch, Eric A. Joseph, Chung H. Lam, Alejandro G. Schrott | 2011-07-05 |