Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7962865 | System and method for employing patterning process statistics for ground rules waivers and optimization | Fook-Luen Heng, Mark A. Lavin, Jin-Fuw Lee, Chieh-Yu Lin, Jawahar P. Nayak | 2011-06-14 |