Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7943412 | Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters | Leena Paivikki Buchwalter, Kevin K. Chan, Timothy J. Dalton, Christopher V. Jahnes, Jennifer Lund +2 more | 2011-05-17 |