Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7979165 | Mass flow rate control apparatus, its calibration method and semiconductor-producing apparatus | Takao Gotoh, Akifumi Hayashi, Tohru Matsuoka, Shigehiro Suzuki, Makoto Tanaka | 2011-07-12 |