Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7979165 | Mass flow rate control apparatus, its calibration method and semiconductor-producing apparatus | Takao Gotoh, Akifumi Hayashi, Tohru Matsuoka, Yoshiyuki Furukawa, Makoto Tanaka | 2011-07-12 |
| 7918238 | Flow controller and its regulation method | Makoto Tanaka | 2011-04-05 |
| 7875179 | Side stream type membrane bioreactor process | Motoharu Noguchi, Koichiro Kando | 2011-01-25 |