Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8036780 | Flow controller and test method therefor, and flow control method | — | 2011-10-11 |
| 7979165 | Mass flow rate control apparatus, its calibration method and semiconductor-producing apparatus | Akifumi Hayashi, Tohru Matsuoka, Shigehiro Suzuki, Yoshiyuki Furukawa, Makoto Tanaka | 2011-07-12 |