Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083960 | Etching endpoint determination method | Hiroshige Uchida, Daisuke Shiraishi, Akira Kagoshima | 2011-12-27 |
| 8038896 | Plasma processing method and apparatus | Eiji Ikegami, Takeshi Shimada, Kenichi Kuwabara, Takao Arase, Tsuyoshi Matsumoto | 2011-10-18 |