Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8038896 | Plasma processing method and apparatus | Shoji Ikuhara, Takeshi Shimada, Kenichi Kuwabara, Takao Arase, Tsuyoshi Matsumoto | 2011-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8038896 | Plasma processing method and apparatus | Shoji Ikuhara, Takeshi Shimada, Kenichi Kuwabara, Takao Arase, Tsuyoshi Matsumoto | 2011-10-18 |