Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8038896 | Plasma processing method and apparatus | Eiji Ikegami, Shoji Ikuhara, Takeshi Shimada, Takao Arase, Tsuyoshi Matsumoto | 2011-10-18 |
| 7989330 | Dry etching method | Takeshi Shima, Tomoyoshi Ichimaru, Kenji IMAMOTO | 2011-08-02 |