Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076251 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Naonori Akae, Yoshiro Hirose, Yushin Takasawa, Ryota Sasajima | 2011-12-13 |