Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076251 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Naonori Akae, Yoshiro Hirose, Yushin Takasawa, Yosuke Ota | 2011-12-13 |
| 7901206 | Heat-treating apparatus and method of producing substrates | Akira Morohashi, Iwao Nakamura, Keishin Yamazaki, Sadao Nakashima | 2011-03-08 |
| 7891975 | Heat treatment apparatus and method of manufacturing substrate | Iwao Nakamura, Akira Morohashi, Ryuji Yamamoto | 2011-02-22 |