Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076251 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Naonori Akae, Yushin Takasawa, Yosuke Ota, Ryota Sasajima | 2011-12-13 |
| 7884034 | Method of manufacturing semiconductor device and substrate processing apparatus | Yushin Takasawa, Tomohide Kato, Nanori Akae | 2011-02-08 |