Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062826 | Positive resist composition and pattern-forming method | — | 2011-11-22 |
| 8034537 | Positive resist composition and pattern forming method | Toshiaki Fukuhara, Hiromi Kanda | 2011-10-11 |
| 7906268 | Positive resist composition for immersion exposure and pattern-forming method using the same | Haruki Inabe, Hiromi Kanda | 2011-03-15 |
| 7892722 | Pattern forming method | Haruki Inabe, Hiromi Kanda | 2011-02-22 |